@InProceedings{MarcianoBoneSantTrav:2007:GrRaOp,
               author = "Marciano, Fernanda Roberta and Bonetti, Luis Fernando and Santos, 
                         L{\'u}cia Vieira and Trava-Airoldi, Vladimir Jesus",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {} and 
                         {Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)}",
                title = "Growth Rate Optimization of Diamond-like Carbon Films for 
                         Industrial Application",
                 year = "2007",
         organization = "Encontro sobre Diamante, Carbono Amorfo, Nanotubos de Carbono e 
                         Materiais Relacionados.",
             abstract = "Diamond-like Carbon (DLC) film is a semiconductor with a high 
                         mechanical hardness, low friction coefficient, chemical inertness, 
                         and optical transparency [1]. Due to these properties, the use of 
                         DLC coatings in mechanical and electrical fields has propelled, 
                         and recently, make it possible for new applications in food, 
                         beverage and biological market segments [2]. These films are now 
                         used in numerous industrial applications, including razor blades, 
                         magnetic hard discs, critical engine parts, mechanical face seals, 
                         scratchresistant glasses, invasive and implantable medical devices 
                         and microelectromechanical systems [3]. Among all DLC growth 
                         parameters, the growth rate has been the focus for many 
                         application when an industrial scaling up is apparent. Thinking on 
                         this, vapor of hexane was used as a feed gas in order to growth a 
                         good quality DLC film on different kind of substrate. It was used 
                         a pulsed valve to injected the vapor of hexane into the deposition 
                         chamber whilst the film was grown with methane. Hexane was chosen 
                         because it has six carbons chain with only C-C and C-H single 
                         bonds in each molecule, increasing the hydrocarbon source. The 
                         hardness and friction coefficient were evaluated by using 
                         nanoindentation and pin-on disc tribometer, respectively. Raman 
                         scattering spectroscopy was used to characterize the quality of 
                         these films. The stress of DLC was measured by prophilometry. The 
                         growth rate as a function of the partial vapor pressure of hexane 
                         inside the chamber will be exhaustively studied. Growth rate up to 
                         five times higher than pure methane is used will be shown.",
  conference-location = "Fortaleza, CE",
      conference-year = "24-26 out.",
             language = "en",
        urlaccessdate = "03 maio 2024"
}